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Design and Construction of a Molecular Beam Mass Spectrometer with Three Differential Pumping Stages
Author(s): 
Pages: 52-57
Year: Issue:  2
Journal: Vacuum Science and Technology

Keyword:  原位取样 离子检测 分子束质谱;
Abstract: 研制了具有三级涡轮分子泵差分抽气系统的分子束质谱装置 ,该装置在 1330 0Pa典型气体采样压力下 ,三级差分抽气区的压力分别达到 5× 10 - 1,3× 10 - 3,1 2× 10 - 4Pa。利用该装置 ,已成功地实现了对活性离子物种N+ 和N+ 2 的“原位”检测
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