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The Size Effect of the Visible Optical Characteristics for Ultrathin Al Films
Author(s): 
Pages: 32-34
Year: Issue:  2
Journal: Vacuum Science and Technology

Keyword:  光学函数 介电函数 超薄铝膜;
Abstract: 利用WFZ90 0 D4型紫外 /可见光分光光度计 ,测量了磁控测射超薄Al膜的可见光反射比和透射比。采用牛顿 辛普森方法确定超薄Al膜光学函数 ,进而计算其介电函数 ,得到了它们随膜厚变化的关系。结果表明 ,不同特征尺寸的薄膜 ,具有不同的电磁特性参数
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