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XPS and ESR Studies of Metal/MoS_2 Composite Films Grown by Ion Beam Assisted Deposition
Author(s): 
Pages: 9-12
Year: Issue:  2
Journal: Vacuum Science and Technology

Keyword:  抗湿性能 离子束辅助沉积 复合膜;
Abstract: 通过IBAD技术制备了MoS2 +Ag(Cu)复合膜 ,并利用XPS和ESR考察了复合膜的氧化情况。发现在RH为 6 0 %的大气环境下 ,Cu的掺入加速了MoS2 的氧化 ,相反Ag的加入却使MoS2 的氧化受到抑制 ;XPS发现MoS2 +Cu复合膜中存在Mo6 + ,ESR却并没发现中间态Mo5+ ;而XPS没有检测到MoS2 +Ag膜中有Mo6 + ,ESR却发现Mo5+ 。这说明Mo5+ 受化学环境影响较大
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