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ZrW_2O_8/ZrO_2 Film Growth and Its Composite Target Fabrication
Pages: 686-689
Year: Issue:  6
Journal: Journal of Vacuum Science and Technology

Keyword:  ZrW_2O_8ZrO_2Pulsed laser depositionLow thermal expansionComposite target;
Abstract: 采用化学共沉淀法合成26wt%ZrW_2O_8/ZrO_2近零膨胀复合陶瓷靶材,并以脉冲激光法在石英基片上沉积制备了ZrW_2O_8/ZrO_2复合薄膜.利用X射线衍射仪(XRD)、热膨胀仪、扫描电子显微镜(SEM)研究了复合靶材的晶体结构、热膨胀性能和致密度,同时也探索了热处理温度对复合薄膜的相组成和表面形貌的影响.结果表明:合成的靶材由α-ZrW_2O_8和m-ZrO_2组成,26wt%ZrW...
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