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Gettering of TiZrV Coatings on Pipe Inner-Walls of Vacuum System
Pages: 678-681
Year: Issue:  6
Journal: Journal of Vacuum Science and Technology

Keyword:  Direct current magnetron sputteringTiZrV pumping coatingsLow temperature activationPressure distribution;
Abstract: 采用直流磁控反溅射法在不锈钢真空管道内表面均匀镀上一层TiZrV薄膜.该薄膜经过激活后具有抽气效应,能够使真空管道由原来的系统气载转变成为管道泵.该薄膜激活温度很低,最低激活温度为180℃.在经过激活后,实验装置远端的真空度与泵口真空度相同,因此压力分布呈直线型.
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