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Surface Modification of Pure Iron by Plasma Nitridation and Ti/TiN Coating
Pages: 581-585
Year: Issue:  6
Journal: Journal of Vacuum Science and Technology

Keyword:  High frequency and low bias voltage plasma immersion and ion implantationUnbalance magnetron sputteringCorrosion resistanceTiNAdhesion;
Abstract: 为改善工业纯铁的耐磨抗腐蚀性能,本文采用低偏压高频等离子浸没离子注入及氮化技术(HLPⅢ)对工业纯铁进行表面改性,然后利用非平衡磁控溅射技术(UBMS)在低压高频等离子浸没离子注入及氮化处理样品表面制备Ti/TiN多层膜.研究发现,工业纯铁在3.5kV脉冲电压(频率15.15kHz,占空比25%)下等离子注入及氮化3h后,表面形成了深度达4μm的氮化层,其相结构以ε-Fe_3N和γ-Fe_4N结构...
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