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Thermomechanical Response of Silicon Materials Heated by Femtosecond Lasers
Author(s): 
Pages: 260-263
Year: Issue:  3
Journal: Laser & Infrared

Keyword:  飞秒激光超快热弹模型硅膜热应力;
Abstract: 为描述飞秒激光辐照半导体材料的热力响应过程,扩展了热电子崩力和自恰场两种模型,得到了完全耦合的非线性热弹方程组.在单轴应力条件下,利用有限差分法,计算了500fs脉冲激光作用下硅膜内载流子温度、晶格温度、热应力和热电子崩力的变化情况,同时考虑了能量密度和薄膜厚度两个因素的影响.数值结果表明:能量密度越高达到热平衡所需的时间就越长;对于比较薄的硅膜,随着激光作用时间的增加,热应力的双峰逐渐增加并由前后表面同时向薄膜的中间移动.
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