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Choice and Analysis of Phase Extracting Algorithm in the MEMS Microscopic Interferometric Testing System
Author(s): 
Pages: 151-154
Year: Issue:  2
Journal: NANOTECHNOLOGY AND PRECISION ENGINEERING

Keyword:  微机电系统相位提取算法误差分析Hariharan算法;
Abstract: 描述了一种基于相移显微干涉术的MEMS测试方法,达到了纳米级分辨力.从理论上分析了4种常用相移算法对测量过程主要噪声(相移器的移相误差和探测器的非线性响应误差)的抑制作用,并选定了适合本系统的Hariharan算法.通过对经过美国国家标准研究院(NIST)认证的一个台阶高度的测量,验证了各种算法的测量精度,说明Hariharan算法对噪声有更强的抑制作用,其测量重复性在亚纳米量级.
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