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Microripple Structures Induced by Femtosecond Laser Pulses
Author(s): 
Pages: 715-718
Year: Issue:  5
Journal: CHINESE JOURNAL OF LASERS

Keyword:  超快光学飞秒激光微突起波纹结构;
Abstract: 利用飞秒激光振荡器产生的脉冲对镀有铬层的玻璃和石英基片进行微加工,发现两种样品表面均有波纹状的微突起结构产生.这些微突起结构离开样品表面的高度为10~300 nm不等,并且随着激光功率的增大而增加,在一定功率下达到饱和状态.它们的形貌、尺寸和高度取决于入射飞秒激光的能流以及飞秒脉冲的参数.通过化学方法证明了这些微突起结构是由玻璃和石英的主要成分SiO2组成的,并非样品表面的铬元素.此外,通过选取适当的飞秒激光功率和样品加工速度,制作了两种不同周期和线宽的光栅结构,显示出飞秒激光振荡器良好的加工性能.
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