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Fabricating Optical Microstructures with Different Profile Characters by Standard Microelectronic Technology
Author(s): 
Pages: 271-274
Year: Issue:  3
Journal: LASER & INFRARED

Keyword:  硅各向异性腐蚀光学微结构非球面;
Abstract: 讨论了一种制作球面和非球面轮廓光学微结构的新方法.此方法的关键步骤是(100)硅在KOH:H2O中的两步各向异性腐蚀.首先在硅衬底的掩膜上要开一组圆孔,圆孔的尺寸与最终的轮廓相对应.通过腐蚀,硅衬底上会出现一组凹球面状的微结构,具有一定轮廓特征的微结构可以由一组这样的凹球面微结构拼接而成.用这个方法可以简单高效地制作出很多用常规工艺难以加工的非球面、不规则的光学微结构.建立了描述此方法的模型,并进行了讨论分析.
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