All-solid-state microscopic interferometer with frequencyvariation and phase-shifting capability
Author(s): TIAN Jin-dong, ZHAO Xiao-bo, PENG Xiang
Pages: 123-125
Year: 2007 Issue: 2
Journal: OPTOELECTRONICS LETTERS
Abstract: A novel microscopic interferometry with ability of frequency-variation and phase-shifting is proposed for microstructures testing. By using acousto-optic technique, sequential carriers can be generated with different spatial frequencies so that the temporal phase unwrapping method can be applied for decoding the height information. Combined with phase-shifting technique realized by spatial light modulator, this method is especially suitable for interferometric measurement with high precision and large dynamic range.
Pages: 123-125
Year: 2007 Issue: 2
Journal: OPTOELECTRONICS LETTERS
Abstract: A novel microscopic interferometry with ability of frequency-variation and phase-shifting is proposed for microstructures testing. By using acousto-optic technique, sequential carriers can be generated with different spatial frequencies so that the temporal phase unwrapping method can be applied for decoding the height information. Combined with phase-shifting technique realized by spatial light modulator, this method is especially suitable for interferometric measurement with high precision and large dynamic range.
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