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An Analysis of Microcantilever's Thermomechanical Performance and Selection of Material
Author(s): 
Pages: 1-3
Year: Issue:  1
Journal: JOURNAL OF LANZHOU PETROCHEMICAL COLLEGE OF TECHNOLOGY

Keyword:  非制冷红外成像系统微悬臂梁热机械性能;
Abstract: 由微悬臂梁结构组成的红外焦平面阵列(FPA)是基于微机电系统结构的非制冷型红外成像系统的核心技术,通过对双金属悬臂梁应力和应变的分析,阐述了影响微悬臂梁热机械性能的主要因素,为正确选择微悬臂梁结构的材质提供理论依据.
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