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EFFECTS OF SPUTTERING POWER ON COMPOSITIONS AND MICROSTRUCTURES OF PRECURSOR FILMS FOR CIGS ABSORBER
Author(s): Zheng Qilin, Zhuang Daming, Zhang Gong, Li Qiufang
Pages: 1108-
1112
Year: 2006
Issue:
11
Journal: ACTA ENERGIAE SOLARIS SINICA
Keyword: CIGS; 太阳能电池; 磁控溅射; 前驱膜;
Abstract: 采用中频交流磁控溅射方法制备了CuIn、CuGa和CIG合金膜.采用SEM和XRD观察和分析了各种薄膜的表面形貌、成分和组织结构.着重分析了靶功率密度对薄膜成分、晶体结构的影响.结果表明,通过调节靶功率密度,能精确控制薄膜中Cu、In、Ga比例.制备得到了Cu/(In+Ga)原子比接近1,且Ga/(In+Ga)比例可调的成分分布均匀的CIG薄膜.CIG前驱膜是以Cu11In9为基础相,Ga原子主要是以替代In原子的固溶体形式存在.当溅射CuIn和CuGa合金靶的功率密度分别为0.26和0.10W/cm2时,可制备得到由Cu11In9和CuIn两相组成的理想的CIG前驱膜.
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