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Pyroelectric Infrared Detectors Based on Amorphous YBCO Thin Films
Author(s): 
Pages: 957-959
Year: Issue:  10
Journal: LASER & INFRARED

Keyword:  非晶YBCO薄膜热释电效应红外探测器;
Abstract: 介绍了非晶YBCO薄膜用作非制冷热释电红外探测器材料.它在室温下显示出强的热释电行为,并且容易在室温下采用射频磁控溅射法沉积,制备工艺与CMOS工艺相兼容,是一种很有潜力的热释电探测器材料.并介绍了非晶YBCO热释电薄膜的研究现状,阐述了该薄膜及其探测器的制备技术和研究动向.
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